CERA-V: Microwave plasma stream source with variable ion energy

A microwave plasma stream source with variable ion energy operated under low magnetic field electron cyclotron resonance conditions has been developed. A two mode resonant cavity (TE111, E010) was used. It was established that overdense plasma creation (TE111) and high energy in-phase space localized electron plasma oscillations (E010) in a decreased magnetic field lead to the potential for ion energy variation from 10 to 300 eV (up to 1 A of ion current, and a plasma cross section of 75 cm2, hydrogen) by varying the TE111, E010 power, the value of the magnetic field, and pressure. The threshold level of E010-mode power was also determined. An application of this CERA-V source to hydrogenation of semiconductor devices without deterioration of surface layers by ions and fast atoms is under investigation. © 1996 American Vacuum Society.

Авторы
Balmashnov A.A.1
Редакторы
-
Издательство
-
Номер выпуска
1
Язык
Английский
Страницы
471-473
Статус
Опубликовано
Подразделение
-
DOI
-
Номер
-
Том
14
Год
1996
Организации
  • 1 Russian Friendship University, Plasma Physics Laboratory, M. Maklaya st., 6, Moscow 117198, Russian Federation
Ключевые слова
-
Дата создания
19.10.2018
Дата изменения
19.10.2018
Постоянная ссылка
https://repository.rudn.ru/ru/records/article/record/846/