Laser Based Spectrophotometer for H2O Traces Analysis in Vacuum Chambers of Low-temperature Plasma Generators

Highly sensitive analysis of neutral gas components, including H2O vapor, in high-vacuum electrical installations designed to generate low-temperature plasma is a pressing analytical and metrological challenge. This article presents a spectrophotometer based on tunable diode lasers designed for the spectral analysis of H2O traces in the vacuum chambers of low-temperature plasma generators using RF- and MWdischarges. The spectral range 7338–7370 cm−1 where vibration-rotational absorption lines of H2O of various symmetry and intensity are located was used for the analysis. Both the detection of the transmission spectra and their derivatives were used for highly sensitive analysis of traces of H2O at low pressures. The sensitivity to resonance absorption and concentration sensitivity in detecting traces of H2O in a rarefied gaseous medium were estimated.

Авторы
Stepanov E.V. , Nikifortseva N.N. , Andreev V.V. 1
Журнал
Atmospheric and Oceanic Optics
Издательство
Pleiades journals
Номер выпуска
39
Язык
Английский
Страницы
853 - 864
Статус
Опубликовано
Подразделение
Институт физических исследований и технологий
DOI
10.1134/S1024856026700673
Номер
6
Год
2026
Организации
  • 1 Российский университет дружбы народов им. Патриса Лумумбы
  • 2 Prokhorov Institute of General Physics, Russian Academy of Sciences
Ключевые слова
H2O absorption spectra; analysis of trace H2O concentration; low-temperature plasma generators; tunable diode laser
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