Microstructural and optical characteristics of waveguiding piezoelectric zinc oxide films

Optical and microstructural characteristics of polycrystalline waveguiding ZnO films deposited by RF reactive sputtering has been investigated. The origin of high waveguiding mode propagation losses and spatial inhomogeneity of the sputtered films has been investigated experimentally. A technique allowing to avoid these disadvantages has been proposed. Using this technique free of mechanical stress highly oriented textured ZnO waveguiding films with optical propagation loss less than 1 dB/cm have been deposited. © COPYRIGHT SPIE.

Авторы
Редакторы
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Сборник материалов конференции
Издательство
SPIE - INT SOC OPTICAL ENGINEERING
Номер выпуска
-
Язык
Английский
Страницы
530-538
Статус
Опубликовано
Подразделение
-
Ссылка
-
Номер
-
Том
2212
Год
1994
Организации
  • 1 Russian Peoples' Friendship University, Radiophysics Department, Moscow, Russian Federation
Ключевые слова
Integrated optics; Oxide films; Reactive sputtering; Stresses; Waveguides; Zinc oxide; Mechanical stress; Micro-structural characteristics; Mode propagation; Optical characteristics; Optical propagation loss; Rf Reactive sputtering; Spatial in-homogeneity; Waveguiding films; Optical films
Дата создания
19.10.2018
Дата изменения
10.03.2019
Постоянная ссылка
https://repository.rudn.ru/ru/records/article/record/959/