CERA-V: Microwave plasma stream source with variable ion energy

A microwave plasma stream source with variable ion energy operated under low magnetic field electron cyclotron resonance conditions has been developed. A two mode resonant cavity (TE(111), E(010)) was used. It was established that overdense plasma creation (TE(111)) and high energy in-phase space localized electron plasma oscillations (E(010)) in a decreased magnetic field lead to the potential for ion energy variation from 10 to 300 eV (up to 1 A of ion current, and a plasma cross section of 75 cm(2), hydrogen) by varying the TE(111), E(010) power, the value of the magnetic field, and pressure. The threshold level of E(010)-mode power was also determined. An application of this CERA-V source to hydrogenation of semiconductor devices without deterioration of surface layers by ions and fast atoms is under investigation. (C) 1996 American Vacuum Society.

Авторы
Сборник материалов конференции
Издательство
AMER INST PHYSICS
Номер выпуска
1
Язык
Английский
Страницы
471-473
Статус
Опубликовано
Том
14
Год
1996
Дата создания
19.10.2018
Дата изменения
19.10.2018
Постоянная ссылка
https://repository.rudn.ru/ru/records/article/record/9382/
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