Power and gas formation efficiency ECR plasma in the coaxial resonator with a helical waveguide structure

Experimental results on the parameters of the ECR plasma formed in a coaxial resonator with a helical waveguide structure are presented. The dependences of the gas and energy efficiency of formation of ion flow on the mass flow rate of the working gas (Ar) and microwave power (2, 45 GHz) introduced into the cavity are obtained.