Power and gas formation efficiency ECR plasma in the coaxial resonator with a helical waveguide structure

Experimental results on the parameters of the ECR plasma formed in a coaxial resonator with a helical waveguide structure are presented. The dependences of the gas and energy efficiency of formation of ion flow on the mass flow rate of the working gas (Ar) and microwave power (2, 45 GHz) introduced into the cavity are obtained.

Авторы
Номер выпуска
2
Язык
Русский
Страницы
50-53
Статус
Опубликовано
Год
2015
Организации
  • 1 People' Friendship University of Russia, Plasma Physics Lab., 6 Miklukho-Maklaya str., Moscow, 117198, Russian Federation
Ключевые слова
Coaxial resonator; Electron cyclotron resonance; Energy efficiency; Gas efficiency; Plasma
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