Probability scheme of constructing the mathematical model of shadowed sputtering

The probability scheme of examination of the shadowed vacuum sputtering process is suggested. If one restricts the consideration by non-scattering part of the scheme the resulting model would be equivalent to geometro-optical shadowing model used by our predecessors. At the same time the scheme gives the possibility for the model improvement. Instead of complicating the model by using the multi-particle scattering it is possible to include all the deviations from geometro-optical model into the distribution function of sputtered particle.

Авторы
Редакторы
-
Издательство
Elsevier Science Publishers B.V., Amsterdam
Номер выпуска
1
Язык
Английский
Страницы
41-46
Статус
Опубликовано
Подразделение
-
Номер
-
Том
130
Год
2000
Организации
  • 1 PFUR, M.-Maclay str. 6, Moscow, Russian Federation
Ключевые слова
Functions; Geometrical optics; Mathematical models; Probability; Shadowed sputtering; Shadowing masks; Sputtering
Дата создания
19.10.2018
Дата изменения
19.10.2018
Постоянная ссылка
https://repository.rudn.ru/ru/records/article/record/456/