Probability scheme of constructing the mathematical model of shadowed sputtering

The probability scheme of examination of the shadowed vacuum sputtering process is suggested. If one restricts the consideration by non-scattering part of the scheme the resulting model would be equivalent to geometro-optical shadowing model used by our predecessors. At the same time the scheme gives the possibility for the model improvement. Instead of complicating the model by using the multi-particle scattering it is possible to include all the deviations from geometro-optical model into the distribution function of sputtered particle.