Analysis of problem in mathematical model for shadowed sputtering

A mathematical model for shadowed sputtering is given. In frame of a given model there exist three problems: a straight problem of predicting Y using given A and X; an auxiliary inverse problem of restoring X using experimentally given A and Y; and a main inverse problem of synthesis the shadowing mask parameters and a mask function A using restored X and prescribed Y. Properties of integral operator of these problems let solving in a stable manner both inverse problems. Besides the methods of their solving and their properties make it possible to approach a predicted function of a sputtered layer with any given accuracy.

Авторы
Sevastianov L.A. 1 , Zhidkov E.P.1
Редакторы
-
Издательство
Elsevier Science Publishers B.V., Amsterdam
Номер выпуска
1
Язык
Английский
Страницы
47-53
Статус
Опубликовано
Подразделение
-
Номер
-
Том
130
Год
2000
Организации
  • 1 PFUR, M.-Maclay str. 6, Moscow, Russian Federation
Ключевые слова
Functions; Geometrical optics; Integral equations; Inverse problems; Mathematical models; Mathematical operators; Probability; Problem solving; Shadowed sputtering; Sputtering
Дата создания
19.10.2018
Дата изменения
19.10.2018
Постоянная ссылка
https://repository.rudn.ru/ru/records/article/record/442/