Linear moving meters designed on the basis of laser probing of scales of a type: Surface acoustic wave (SAW) - Diffraction grating (DG)

A comparative analysis of moving meters schemes of an acoustic-optical type is carried out. Reference scales formed by surface acoustic waves and diffraction gratings are used in these schemes. The system SAW-DG is probed by a laser beam. The measurement of movement is effected by change of the phase of a signal at SAW frequency in the optoelectronic channel. Repeatability, resolving power, exactitude, range of measurements are analyzed. The resolving power better than 0,05 microns can be reached using SAW wave-length in a range of 30 up to 100 microns.

Авторы
Редакторы
-
Сборник материалов конференции
Издательство
-
Номер выпуска
1
Язык
Английский
Страницы
312-319
Статус
Опубликовано
Подразделение
-
Ссылка
-
Номер
-
Том
4900
Год
2002
Организации
  • 1 Peoples' Friendship Univ. of Russia, 6 Miklukho-Maklaya Str., 117198 Moscow, Russian Federation
Ключевые слова
Acousto-optics; Moving meters; Surface acoustic waves
Дата создания
19.10.2018
Дата изменения
19.10.2018
Постоянная ссылка
https://repository.rudn.ru/ru/records/article/record/231/