Nanomechanical Oscillating Multi-Purpose Device Based on Alloy with Shape Memory Effect

We propose and create a new nanomechanical oscillating device based on the shape memory effect of Ti2NiCu alloy. The device is designed for cutting and detaching micro- and nano-objects using its oscillating sharp tip. The oscillations have a frequency of up to 8 kHz and an amplitude of 1.2 μm. We performed an initial experiment to cut a ZiO nanowire using the new device. A numerical model of the device was developed to estimate the thermal activation frequency and mechanical resonant frequency based on its geometric parameters. © 2023 IEEE.