Power and gas formation efficiency ECR plasma in the coaxial resonator with a helical waveguide structure

Experimental results on the parameters of the ECR plasma formed in a coaxial resonator with a helical waveguide structure are presented. The dependences of the gas and energy efficiency of formation of ion flow on the mass flow rate of the working gas (Ar) and microwave power (2, 45 GHz) introduced into the cavity are obtained.

Authors
Balmashnov A.A. 1 , Butko N.B.1 , Kalashnikov A.V. 1 , Kalashnikov V.V. 1 , Stepina S.P. 1 , Umnov A.M. 1
Journal
Applied Physics
Number of issue
2
Language
Russian
Pages
50-53
Status
Published
Link
External link
Year
2015
Organizations
  • 1 People' Friendship University of Russia, Plasma Physics Lab., 6 Miklukho-Maklaya str., Moscow, 117198, Russian Federation
Keywords
Coaxial resonator; Electron cyclotron resonance; Energy efficiency; Gas efficiency; Plasma
Date of creation
19.10.2018
Date of change
19.10.2018
Short link
https://repository.rudn.ru/en/records/article/record/4665/
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