To the Problem of Recognition the Results of Electron Spectroscopy of Nanostructures with the Use of Discrete Wavelet-Transformation

The article presents application of discrete wavelet transform (Haar wavelet) for the spectra of recognition of two samples-silicon and silicon compound. The method presented by the authors uses the data obtained as a result of the experiment on a scanning electron microscope ZEISS SIGMA SEM HD. The visual comparison of the wavelet coefficients obtained is laborious, so the problem arises of automating the process of comparison and recognition, thus the results of the discrete wavelet transformation are the statistical characteristics-the arithmetic mean, the variance and the standard deviation. © 2018 IEEE.

Authors
Kozhanova E.R.1 , Tkachenko I.M. 2
Publisher
Institute of Electrical and Electronics Engineers Inc.
Language
Russian
Pages
280-284
Status
Published
Number
8542352
Year
2018
Organizations
  • 1 Yuri Gagarin State Technical University of Saratov, Russian Federation
  • 2 RUDN University, Moscow, Russian Federation
Keywords
Discrete wavelet transforms; Electron devices; Electron spectroscopy; Electrons; Scanning electron microscopy; Silicon compounds; Arithmetic mean; Discrete wavelet transformation; Haar wavelets; Standard deviation; Statistical characteristics; Visual comparison; Wavelet coefficients; Signal reconstruction
Date of creation
04.02.2019
Date of change
04.02.2019
Short link
https://repository.rudn.ru/en/records/article/record/36236/
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