The possibility of creating spectral multiplexers/demultiplexers with temperature-independent parameters is considered. The reasons for the temperature shift of the central wavelength of waveguide arrays of multiplexers/demultiplexers, optical filters, Mach-Zehnder interferometers, and others are analyzed. The results of studies of various techniques of wavelength stabilization of integrated-optical spectral devices and the evaluation of the efficiency of each of them are presented. The prospects of using media with a negative temperature coefficient for creation of waveguide devices are shown. © Springer Science+Business Media, Inc. 2005.