The waveguide method for measuring parameters of the surface layers

A new method has been applied for determining the mean square deviation of surface roughness and the imaginary part of permittivity of the material near-surface region. The method is based on the scattering and absorption of light in waveguide systems of integrated optics. It has high sensitivity and ease of implementation. The advantages of the proposed method are confirmed experimentally. © 2012 EDP Sciences.

Authors
Danilenko S.S. 1 , Osovitskii A.N. 1
Journal
EPJ Applied Physics
Number of issue
2
Language
English
Pages
11301-p1-11301-p4
Status
Published
Link
External link
DOI
10.1051/epjap/2012120068
Volume
59
Year
2012
Organizations
  • 1 Department of Radiophysics, People’s, Friendship University of Russia, 6 Miklukho-Maklaya str., Moscow, 117198, Russian Federation
Keywords
High sensitivity; Imaginary parts; Mean square deviation; Measuring parameters; Near surface regions; Scattering and absorption; Surface layers; Waveguide systems; Surface roughness; Waveguides
Date of creation
19.10.2018
Date of change
19.10.2018
Short link
https://repository.rudn.ru/en/records/article/record/2290/
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