Time-resolved evolution of plasma parameters in a plasma immersion ion implantation source

Issue number
12
Language
English
Pages
123523
State
Published
Volume
28
Year
2021
Organizations
  • 1 Department of Physics and Engineering Physics|University of Saskatchewan
  • 2 Aix-Marseille Université|CNRS|PIIM|UMR 7345|Centre Scientifique de Saint Jérôme|Case 241
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