Time-resolved evolution of plasma parameters in a plasma immersion ion implantation source

Authors
Moreno J. 1 , Khodaee A. 1 , Okerstrom D. 1 , Bradley M.P. 1 , Couëdel L. 1, 2
Journal
Physics of Plasmas
Number of issue
12
Language
English
Pages
123523
Status
Published
Volume
28
Year
2021
Organizations
  • 1 Department of Physics and Engineering Physics|University of Saskatchewan
  • 2 Aix-Marseille Université|CNRS|PIIM|UMR 7345|Centre Scientifique de Saint Jérôme|Case 241
Date of creation
11.07.2024
Date of change
11.07.2024
Short link
https://repository.rudn.ru/en/records/article/record/153473/
Share

Other records

BIOMASS BURNING NITROGEN DIOXIDE EMISSIONS DERIVED FROM SPACE WITH TROPOMI: METHODOLOGY AND VALIDATION

Article
Griffin D., McLinden C.A., Chen J., Hayden K., Mihele C., Wren S.N., Liggio J., Akingunola A., Makar P., Fehr L., Bourassa A., Degenstein D., Dammers E., Adams C., Stockwell C.E., Warneke C., Bourgeois I., Peischl J., Ryerson T.B., Rollins D., Rickly P.S., Rowe J.P., Volkamer R., Kille N., Koenig T.K., Zarzana K.J., Lee C.F., Knote C.
Atmospheric Measurement Techniques. Vol. 14. 2021. P. 7929-7957