Proceedings of SPIE - The International Society for Optical Engineering. 2002. P.. 792-801
Linear moving meters designed on the basis of laser probing of scales of a type: Surface acoustic wave (SAW) - Diffraction grating (DG)
Authors
Conference proceedings
Publisher
SPIE
Language
English
Pages
312-319
State
Published
Year
2002
Organizations
- 1 Peoples' Friendship Univ. of Russia
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Other records
Proceedings of SPIE - The International Society for Optical Engineering. 2003. P.. 299-309