On nonlocal heating in inductively coupled plasmas

Tyshetskiy, Yu.O.; Smolyakov, A.I.; Godyak, V.A.

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Authors

Tyshetskiy Yu.O. ¹ , Smolyakov A.I. ¹ , Godyak V.A. ²

Journal

Plasma Sources Science and Technology

Publisher

IOP, Bristol, United Kingdom

Issue number

Language

English

Pages

203-207

State

Published

Volume

Year

2002

Organizations

¹ Department of Physics and Engineering Physics|University of Saskatchewan
² OSRAM Sylvania

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