Annular surfaces in annular field systems

We present an optical surface description that is more suitable for designing annular field systems than the standard aspheric surface representation. The use of this novel surface description leads to shorter design times and improved systems. © 1997 Society of Photo-Optical Instrumentation Engineers.

Авторы
Sasian J.M.1, 2, 3, 4, 5
Журнал
Optical Engineering
Издательство
SPIE
Номер выпуска
12
Язык
Английский
Страницы
3401-3403
Статус
Опубликовано
Ссылка
Внешняя ссылка
DOI
10.1117/1.601579
Том
36
Год
1997
Организации
  • 1 Optical Sciences Center, University of Arizona, Tucson, AZ 85721, United States
  • 2 SPIE, United States
  • 3 University of Mexico, Mexico
  • 4 University of Arizona, United States
  • 5 AT and T Bell Laboratories, United States
  • 6 Optical Sciences Center, University of Arizona, United States
Ключевые слова
Annular fields; Aspheric surfaces; Lithography; Optical surfaces; Optical systems; Projection cameras; Reflective systems; Ring fields
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