Analytical technologies for thin coating element material diagnostics with PXWR application

The work presents short characteristics of methods for nondestructive analysis of the material element composition in the bulk and thin surface layer of studied objects. Rutherford backscattering spectrometry was chosen as the basic analytical method owing to absoluteness of it experimental data. This method can be used for the element diagnostics both bulk and thin film coating, successfully. The trace element concentration in target surface layers with thickness 3-5 nm was determinated by TXRF spectrometry application. The work characterizes in the details the Proton Induced X-ray Emission (PIXE) spectrometry, which is very effective for the light element diagnostics in materials. There is presented in the short summary a description of the X-ray nanophotonics new device – the planar X-ray waveguide-resonator (PXWR). Experimental investigations showed that the device application for TXRF method modification decreases pollution detection limits on two orders and creates on PIXE spectrometry base new effective method for the target surface element diagnostics. © 2020, Univelt Inc. All rights reserved.