A COMPREHENSIVE STUDY OF NONUNIFORMITY PROPERTIES OF THE LICOO<SUB>2</SUB> THIN-FILM CATHODE FABRICATED BY RF SPUTTERING Статья Kurbatov S.V., Rudy A.S., Naumov V.V., Mironenko A.A., Savenko O.V., Smirnova M.A., Mazaletsky L.A., Pukhov D.E. Russian Microelectronics. Pleiades Publishing. Том 53. 2024. С. 202-216
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