ADVANCED PROCESSES FOR LOW-TEMPERATURE FORMATION OF FUNCTIONAL METAL OXIDE BASED THIN FILMS Статья Abduev A., Akhmedov A., Asvarov A., Kanevsky V., Muslimov A., Belyaev V., Generalov D., Nikolaeva D., Tirado J., Frah M.A.A. Journal of Physics: Conference Series. Institute of Physics Publishing. Том 2056. 2021.
