Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Type
Journal
Сокращенное название на английском и других языках, кроме русского
J Vac Sci Technol B Microelectron Nanometer Struct
Codes
ISSN: 1071-1023
Date of creation
19.10.2018
Date of change
19.10.2018
Short link
https://repository.rudn.ru/en/recordsources/recordsource/236/
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