Microstructural and optical characteristics of waveguiding piezoelectric zinc oxide films

Optical and microstructural characteristics of polycrystalline waveguiding ZnO films deposited by RF reactive sputtering has been investigated. The origin of high waveguiding mode propagation losses and spatial inhomogeneity of the sputtered films has been investigated experimentally. A technique allowing to avoid these disadvantages has been proposed. Using this technique free of mechanical stress highly oriented textured ZnO waveguiding films with optical propagation loss less than 1 dB/cm have been deposited. © COPYRIGHT SPIE.

Authors
Shevtsov V.M. 1 , Agapov A.Y. 1 , Zhitkov P.M. 1
Conference proceedings
Proceedings of SPIE. LINEAR AND NONLINEAR INTEGRATED OPTICS
Publisher
SPIE - INT SOC OPTICAL ENGINEERING
Language
English
Pages
530-538
Status
Published
DOI
10.1117/12.185162
Volume
2212
Year
1994
Organizations
  • 1 Russian Peoples' Friendship University, Radiophysics Department, Moscow, Russian Federation
Keywords
Integrated optics; Oxide films; Reactive sputtering; Stresses; Waveguides; Zinc oxide; Mechanical stress; Micro-structural characteristics; Mode propagation; Optical characteristics; Optical propagation loss; Rf Reactive sputtering; Spatial in-homogeneity; Waveguiding films; Optical films
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