Annular surfaces in annular field systems

We present an optical surface description that is more suitable for designing annular field systems than the standard aspheric surface representation. The use of this novel surface description leads to shorter design times and improved systems. © 1997 Society of Photo-Optical Instrumentation Engineers.

Authors
Sasian J.M.1, 2, 3, 4, 5
Journal
Optical Engineering
Publisher
SPIE
Number of issue
12
Language
English
Pages
3401-3403
Status
Published
Link
External link
DOI
10.1117/1.601579
Volume
36
Year
1997
Organizations
  • 1 Optical Sciences Center, University of Arizona, Tucson, AZ 85721, United States
  • 2 SPIE, United States
  • 3 University of Mexico, Mexico
  • 4 University of Arizona, United States
  • 5 AT and T Bell Laboratories, United States
  • 6 Optical Sciences Center, University of Arizona, United States
Keywords
Annular fields; Aspheric surfaces; Lithography; Optical surfaces; Optical systems; Projection cameras; Reflective systems; Ring fields
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