Microwave injector of plasma formed in a narrow coaxial resonator: Experiment and computer simulations

Under the conditions of simultaneous extraction of the ion and electron plasma components and the formation of a current-compensated plasma flow created in a narrow coaxial resonator by the ECR radiation, the radial distributions of the ion current at different mass flow rates of the working gas (argon) were obtained. The computer PIC simulations were performed using the three-dimensional numerical model in order to determine the intensity of the plasma flow as a function of the experimental parameters. © 2019 Published under licence by IOP Publishing Ltd.