Generation of plasma flow based on ECR discharge in a narrow coaxial cavity

The possibility of simultaneous extraction of the ionic and electronic components of the plasma and the formation of a current-compensated plasma stream generated in a narrow coaxial resonator on ECR has been established. The characteristic dependences of the ion current on the mass flow rate of the gas (argon) and the microwave power introduced into the resonator are presented. © 2019 Federal Informational-Analytical Center of the Defense Industry. All rights reserved.

Journal
Number of issue
3
Language
Russian
Pages
5-9
Status
Published
Volume
2019-January
Year
2019
Organizations
  • 1 Peoples' Friendship University of Russia (RUDN University), 6 Miklukho-Maklaya St., Moscow, 117198, Russian Federation
Keywords
Coaxial resonator; Electron cyclotron resonance; Particle extraction system; Plasma
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