Using Rutherford back-scattering (RBS), secondary ion mass spectrometry (SIMS), Auger-electron spectroscopy (AES), transmission electron microscopy (TEM) and scanning electron microscopy (SEM) techniques, formation of different point and linear defects have been found in iron as a result of intense pulsed-ion beam (IPIB) treatment. The close correlation between an average scalar dislocation density with a microhardness magnitude has been proved both in near-surface layers and at large depths. The comparable analysis of structure-phase damage after IPIB and intense pulsed-electron beam irradiation is interesting for an explanation of different modified properties and an application of such treatments in technologies.