Light spectroscopy and probe measurements of electron temperature in Ar plasmas of pulse-periodic microwave discharge

A permanent-magnet, pulse-periodic 2.45 GHz ECR plasma source has been constructed and tested in the range of 1·10-4-4·10-3 Torr argon with net pulsed microwave input power up to 600 W. Optical emission spectroscopy (EOS), photometry and probes for different purposes were used to investigate trends of plasma parameters changes within processing parameters. The electron temperature has been measured by using a Langmuir probe and relative intensities of the emission over a wide range of pressure and for various levels of the h.f. power applied to the discharge. The obtained EOS results agree to temperatures measured directly by the double probe within the limits of the experimental errors.