A Comprehensive Study of Nonuniformity Properties of the LiCoO2 Thin-Film Cathode Fabricated by RF Sputtering

Abstract: The influence of nonuniformity properties of the LiCoO2 cathode film deposited by magnetron sputtering on the capacity of all-solid-state thin-film lithium-ion batteries (ASSLIB) was studied. It was found that the film nonuniformity corresponds to the magnetron plasma density distribution and the angular distribution of sputtered particles. The capacity distribution of the ASSLIB with LiCoO2 cathode depending on the distance to the substrate center was studied. The maximum capacity corresponded to the dense part of the toroidal region of the magnetron plasma. It was determined that the main causes of batteries capacity decline in the central part and on the edge of the substrate are the impurity phase of lithium cobaltate and the smaller thickness of the cathode layer, respectively. © Pleiades Publishing, Ltd. 2024. ISSN 1063-7397, Russian Microelectronics, 2024, Vol. 53, No. 3, pp. 202–216. Pleiades Publishing, Ltd., 2024.

Authors
Kurbatov S.V. , Rudy A.S. , Naumov V.V. , Mironenko A.A. , Savenko O.V. , Smirnova M.A. , Mazaletsky L.A. , Pukhov D.E.
Journal
Russian Microelectronics
Publisher
Pleiades Publishing
Number of issue
3
Language
English
Pages
202-216
Status
Published
Link
External link
DOI
10.1134/S1063739724600250
Volume
53
Year
2024
Organizations
  • 1 Valiev Institute of Physics and Technology, Yaroslavl Branch, Yaroslavl, 150067, Russian Federation
  • 2 Demidov Yaroslavl State University, Yaroslavl, 150003, Russian Federation
  • 3 Patrice Lumumba Peoples’ Friendship University of Russia, Moscow, 117198, Russian Federation
Keywords
nonuniformity cathode layer; RF magnetron sputtering; variation of specific capacitance; аll-solid-state thin-film lithium-ion battery
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