Nanomechanical Oscillating Multi-Purpose Device Based on Alloy with Shape Memory Effect

We propose and create a new nanomechanical oscillating device based on the shape memory effect of Ti2NiCu alloy. The device is designed for cutting and detaching micro- and nano-objects using its oscillating sharp tip. The oscillations have a frequency of up to 8 kHz and an amplitude of 1.2 μm. We performed an initial experiment to cut a ZiO nanowire using the new device. A numerical model of the device was developed to estimate the thermal activation frequency and mechanical resonant frequency based on its geometric parameters. © 2023 IEEE.

Authors
Prokunin A. , Sergei R. , Irzhak A. , Lega P. , Alexander P. , Koledov V. , Orlov A.
Conference proceedings
2023 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2023 - Proceedings
Publisher
Institute of Electrical and Electronics Engineers Inc.
Language
English
Pages
137-140
Status
Published
DOI
10.1109/3M-NANO58613.2023.10305400
Year
2023
Organizations
  • 1 Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences, Moscow, Russian Federation
  • 2 Bauman Moscow State Technical University, Moscow, Russian Federation
  • 3 Institute of Microelectronics Technology and High-Purity Materials of Russian Academy of Sciences, Chernogolovka, Russian Federation
  • 4 Rudn University, Moscow, Russian Federation
Keywords
control system; nanomechanical; nanotweezers; oscillating device; shape memory effect
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