Predicted depth profiles for nitrogen-ion implantation into gallium arsenide

Authors
Risch M. 1 , Bradley M. 1
Journal
Physica Status Solidi (C) Current Topics in Solid State Physics
Publisher
John Wiley & Sons
Number of issue
4
Language
English
Pages
939-942
Status
Published
Volume
5
Year
2008
Organizations
  • 1 Department of Physics and Engineering Physics|University of Saskatchewan
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